全球领先的真空设备供应商Edwards近日发布iXL120，拓展了其面向半导体制造工艺的干泵设备产品。iXL120具有专为负载时钟和其他清洗应用的设计，在同等产品中可达到最快速的抽取速度，同时还具有低能耗、高吞吐量的特点，降低拥有者成本。

EDWARDS EXPANDS VACUUM PUMP OFFERING FOR SEMICONDUCTOR PROCESSING WITH NEW iXL120

 Fastest pump down time and low energy consumption provide industry-leading cost of ownership for semiconductor load lock and other clean applications

CRAWLEY, WEST SUSSEX, U.K. (July 7, 2010) — Edwards, a leading global supplier of vacuum and abatement equipment and services, today introduced the iXL120, expanding its range of dry pumps for use in semiconductor manufacturing processes. Designed for load lock and other clean applications, the new iXL120 provides the fastest pump down in its class and low energy consumption for high throughput and low cost of ownership.

“With the introduction of this innovative new pump, Edwards dry pump suite of products, which also include the iGX and iXH series, provide our semiconductor customers with a complete range of vacuum solutions optimized for their manufacturing process requirements,” said Andy Mann, semiconductor dry pump product manager at Edwards. “The iXL120’s class-leading pumping speed, combined with its low power consumption, small footprint and minimal maintenance, help reduce its cost of ownership. Our pumps’ Green Mode, in which power consumption is reduced by up to 92 percent, helps improve both cost of ownership and environmental impact.”

With a peak pumping speed of 110m3/h, the iXL120 is 22 percent faster than any other pump in its class (20 liter chamber). The average energy consumption (power at 700T exhaust pressure) is only 550 W, one of the lowest in its class.

The iXL120 is one of the smallest (450mm L x 230mm W x 280mm H) and lightest (59 kg) pumps available for clean and loadlock applications. It is small and light enough to be mounted on the process tool or within the fab’s waffle floor, helping to save valuable fab floor space.

Unlike most competing dry pumps, the iXL120 incorporates oil lubricated precision bearings and timing gears. This reduces vibration during pump operation, which is especially important when the pump is mounted on the process tool. It is also more reliable and eliminates routine maintenance.

The new iXL120 pump includes a zero nitrogen purge option for processes that do not use corrosive gases. The zero purge option eliminates the need to provide nitrogen to the pump, simplifying operation and reducing operating costs. The iXL120N includes a nitrogen purge for use where there is a risk of corrosive gas carryover.